Title (J) field includes “製膜反応速度式”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 2 | J216 | Investigation of reaction kinetic equation for film formation in the CVI process for production of SiCf/SiC-CMC | SiC CVI CVD | ST-25 | 826 |
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SCEJ 55th Autumn Meeting (Sapporo, 2024)